Conference Chair
L. Frey (Fraunhofer IISB, Germany)
Conference Co-Chair
R. Ploss (Infineon, Germany)
Technical Program Committee
Chair: V. Häublein (Fraunhofer IISB, Germany)
P. Chu (Hong Kong City University, China)
A. Claverie (CEMES/CNRS, France)
M.I. Current (Current Scientific, USA)
R. Duffy (Tyndall, Irland)
J. England (University of Surrey, UK)
D. Fuchs (Infineon, Germany)
J. Gyulai (KFKI, Hungary)
Y. Inouchi (Nissin Ion, Japan)
A. Jain (Globalfoundries, USA)
F.A. Khaja (Applied Materials, USA)
W. Lerch (Centrotherm, Germany)
J. Matsuo (Kyoto University, Japan)
S. Mehta (AIBT, Taiwan)
J. Nieß (HQ-Dielectrics GmbH, Germany)
P. Pichler (Fraunhofer IISB, Germany)
L. Rubin (Axcelis, USA)
W. Schustereder (Infineon, Austria)
W. Skorupa (HZDR, Germany)
M. Takai (Osaka University, Japan)
C. Trautmann (GSI, Germany)
W. Vandervorst (IMEC, Belgium)