Sponsors of IIT 2018

Infineon Technologies

Key Products: Semiconductors

Infineon designs, develops, manufactures and markets a broad range of semiconductors and system solutions. The focus of its activities is on automotive electronics, industrial electronics, RF applications, mobile devices and hardware-based security. Combining entrepreneurial success with responsible action, at Infineon we make the world easier, safer and greener. Barely visible, semiconductors have become an indispensable part of our daily lives. Infineon’s components play an essential role wherever energy is generated, transmitted and used efficiently. Furthermore, they safeguard data communication, improve safety on roads and reduce vehicles’ CO2 emissions.

www.infineon.com

Entegris

For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.

www.entegris.com

High Voltage Engineering Europa (HVE)

Key Products: Customized Production Ion Implanters

High Voltage Engineering designs, develops, manufactures and markets a broad range of accelerator based systems for a wide range of scientific and industrial applications, including customized ion implantation systems for semiconductor device fabrication. A wide range of ion sources, electrostatic single-ended and tandem-type accelerators and end stations facilitate customized implantation tools for automated single wafer and/or batch processing of conventional and thin wafers of various materials with a diameter up to incl. 300 mm by virtually any ion species with a beam energy ranging from 10 keV up to several 10s of MeV and a beam current ranging from 100 micro-amps to several milliamps at room, at low or at elevated temperatures.

www.highvolteng.com

Nissin Ion Equipment

Nissin Ion Equipment focuses on the business based on our proprietary ion beam and plasma technologies through developing and manufacturing various kinds of equipment. We supply medium current, high current and high temperature implanters for semiconductor device, and also supply large area beam implanters for flat panel display. We will continue to offer a solution that fits customer’s needs from our manifold experiences and technologies.

www.nissin-ion.co.jp/en/

NuMat Technologies + Versum Materials

          

NuMat Technologies is the global leader in the development and commercialization of Metal-Organic Frameworks (MOFs). MOF materials are a new class of crystalline adsorbents with broad applicability in electronics materials storage, delivery, purification, and abatement. These adsorbents have unprecedented surface areas and uniform pore sizes that can be precisely customized to the specific properties of electronic gases. ION-X® is a sub-atmospheric dopant gas delivery system designed for ion implantation, and the first commercial product that uses MOFs.
www.numat-tech.com

At Versum Materials, our mission is simple. We help the biggest semiconductor companies around the world stretch the boundaries of science and technology. We delivery specialty expertise, inclusive innovation and valued products and solutions that bring cutting-edge innovation to market faster, easier and more reliably than ever before.
www.versummaterials.com

Plansee

Plansee – Precision Components for Ion Implanter Systems

Since 1921, Plansee has specialized in material and manufacturing technology for the most demanding applications.  We are a global leader in design and manufacturing of implanter beamline components. Over the past 40 years, we have developed a portfolio of ~10,000 standard and advanced design components which are sure to fit your needs. Our deep experience coupled with a sharp focus on cost-of-ownership and global supply chain development ensures that you achieve your quality, throughput, and cost-reduction goals without taking unnecessary risk. We specialize in the design and production of tungsten, molybdenum, graphite, and ceramic components used in all modern semiconductor implanters.

www.plansee.com
ionimplantation@plansee.com

Semilab

Semilab is a Hungary-based metrology company established in 1989 by a group of scientists from the Research Institute for Technical Physics of the Hungarian Academy of Sciences.

We design, produce and sell metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices, flat panel displays and solar cells, and also for R&D purposes in these areas. We work with a variety of non-contact and non-destructive measurement techniques.

Semilab offers a wide range of techniques from electrical to optical measurements, as well as a variety of tools from manual loading to full SEMI-compliant 300 mm systems to address the different market needs.

Ion implant monitoring is one of Semilab’s focus, which is being addressed by primary 3 techniques:
- Sheet resistance meaurement (contact 4PP, and non-contact JPV)
- Implanter monitoring by photo-modulated reflectance
- Implant defect monitoring by En-Vision

www.semilab.com

X-FAB Silicon Foundries

Key Products: Semiconductors

The X-FAB group is a leading analog/mixed-signal and specialty foundry. At our six manufacturing sites in Germany, France, Malaysia and the U.S., X-FAB manufactures wafers on modular CMOS and SOI processes with technologies ranging from 1.0 to 0.13 µm. In addition, we offer special-purpose technologies such as SiC and MEMS processes. Our total manufacturing capacity amounts to approximately 94,000 8-inch equivalent wafer starts per month. At X-FAB we combine solid, specialized expertise in advanced analog and mixed-signal technologies with excellent service, a high level of responsiveness and first-class technical support. In Germany, X-FAB has a workforce of more than 1,000 highly-qualified employees. Worldwide, our X-FABulous team counts approx. 4,000 people.

www.xfab.com

Advanced Ion Beam Technology (AIBT)

Over the past 2 decades, Advanced Ion Beam Technology, Inc. (AIBT) has been a leading provider of high current implant solutions for the semiconductor industry. As the only provider of high current implanters equipped with both ribbon and spot beam capability, AIBT’s products are currently employed in meeting the production demands of our customers in all segments of 7 nm technology. Our best-in-class low energy performance, defect & contamination control is enabling our customers to achieve high yields on their devices. We continue to collaborate with our customers to understand their emerging needs and align our technology pipeline to deliver novel & differentiating solutions for future devices down to 3 nm.

www.aibt.com.tw

Applied Materials

Applied Materials is the leader in materials engineering solutions used to produce virtually every new chip and advanced display in the world. Our expertise in modifying materials at atomic levels and on an industrial scale enables customers to transform possibilities into reality. At Applied Materials, our innovations make possible the technology shaping the future.

www.appliedmaterials.com

Axcelis Technologies

Key Products: Ion Implantation Solutions for the Semiconductor Industry

Axcelis has been providing innovative, high-productivity solutions for the semiconductor industry for over 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process.

www.axcelis.com

CAPRES

CAPRES is the global leader in direct wafer level measurements of Sheet Resistance, Mobility, Active Carrier Density, RA, MR and E-TEST using micro- and nanoscale multi-cantilever probes. Our expertise in micro- and nanoscale multi-cantilever probes and advanced metrology tools enables our customers to get fast, accurate, high resolution and valuable electrical information from direct wafer level measurements on ultrathin films, film stacks and 3D structures. CAPRES’ semi- and fully-automatic probing tools are used for R&D and in-line metrology by all leading companies and research centers in the semiconductor and memory industries.

www.capres.com

Core Systems

Established in 1990, Core Systems has been continuously supporting ion implanter technology, providing supporting services and extending the life of implant equipment with component improvement programs. Core services include refurbishment of all disk and heat sink developments introduced since the early 1980’s.  Core products include new disks, components and consumables for Varian, Applied Materials & Axcelis ion implanters.

www.coresystems.com

Ion Technology Solutions

iON Technology Solutions is an innovative engineering company that provides proprietary enhancements for ion implantation equipment. Since its inception in 1982, iTS has been committed to the development of new solutions and has been a main supplier of ceramic, graphite, molybdenum and tungsten components to foundries and fabs worldwide. These solutions are complemented and supported by our tremendous investment and focus on internal research and development. It is iTS’s desire to develop strategic partnerships with semiconductor facilities worldwide to provide technical solutions to their most complex problems.

www.iontechsol.com

Praxair

Praxair - Making our planet more productive
Praxair's proven UpTime (TM) ion implant solutions make your process more productive by increasing beam current, extending source life, reducing materials costs and enhancing safety. Backed by over 30 years' experience, our novel packaging and gas blend technologies are as reliable as they are efficient. Praxair provides not only implant gases but industrial and specialty gases, sputtering targets and delivery systems globally that meet the exacting standards of safety, quality, control, reliability and performance of the microelectronics industries, with state-of-the-art facilities in North America, Europe and Asia.

www.praxair.com/industries/electronics/semiconductors

SCREEN LASSE

http://www.screen.co.jp/eng/spe/lasse/

Sumitomo Heavy Industries Ion Technology

We walk with our customers; Sumitomo Heavy Industries Ion Technology is always striving to contribute to the development of the semiconductor business by providing in a timely manner the technology that customers need at the site of development or production. We meet diverse customer needs by providing systems incorporating state-of-the-art technology that enable high performance, high reliability, and low cost.

www.senova.co.jp

SUMCO

Key Products: Silicon Wafers for Semiconductors

SUMCO manufactures high quality silicon wafers for semiconductors, meeting various needs of customers.
We have established a global network for technology development, manufacturing and sales.

http://www.sumcosi.com/english/

Tektronix

The product portfolio of Tektronix and Keithley covers mainly the following products:
Oscilloscopes and probes, signal generators and analyzers, sources and power supplies, multimeters, switches and data acquisition systems, semiconductor characterization systems, video tests, software

Since 1946 Tektronix and Keithley deliver innovative, precise and easy-to operate test, measurement and monitoring solutions that solve problems, unlock insights and drive discovery. We work together with our research customers on breakthrough experiments and support researchers worldwide in many segments from ultra-fast data communication to Nobel Price researchers.

www.tektronix.com

ULVAC

ULVAC - we are ultimate in vacuum
ULVAC GmbH was established in 1987 as the European subsidiary of ULVAC, Inc., headquartered in Munich, Germany. From Munich our sales and service team serves EMEA region. ULVAC provides a very broad portfolio of manufacturing equipment for the vacuum, materials, and thin film industries. ULVAC’s solutions diversely incorporate equipment, materials, analysis, and services for semiconductors, MEMS, flat panel displays, electronic components, PCB, TFB and other vacuum equipment.

For power device application ULVAC has developed systems dedicated to SiC, Si and GaN manufacturing. This equipment range includes ion implanting for SiC for relatively high dose implant (2xE20/cm3) up to 600 °C to maintain 4H poly-type structure. For Si IGBT we offer low energy/high current for field stop implant and mid current/high energy including ultra-thin wafer processing and TAIKO. In addition, ULVAC offers a line of sputtering, evaporation, plasma etch, ashing equipment, ion implanting, oxidation/POA/nitridization, and activation annealing for both R&D and manufacturing.

www.ulvac.eu